Section V Maintenance, Re (2024)

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Section V Maintenance, Repair, and Calibration ) GAS BALLAST VALVE DRAIN GUIDE Figure 5-1. Fore Pump Flush and Oil Change 5 Place the drain pan underthe drain guide then remove the drain plug. Aftertheoil has stopped flowing, replace the drain plug. 6 Add fresh oil through the fill port. Check that the oil level is in the center of the sight glass. 7 Replace the fill plug and turn on the leak detector. 8 Check the oil level in the forepump sight glass; the oil must be visible in the middle of the glass when the pump is running. 5-2-4 Semi-annually a) Fore pump flush and oil change (See Figure 5-1) Perform the fore pump flush and oil change in accordance with the following steps. 5-4 6999-09-720

Section V Maintenance, Repair, and Calibration Tools and supplies required: Standard screwdriver, 4" to 6" Adjustable wrench Funnel Drain pan Wiping rag <strong>Varian</strong> Pump Oil, part no. 0491-K7516-302, 1 liter Separate the fore pump module from the basic module as follows. 2 Remove the front and rear covers to expose the fore pump. 3 Remove the leakdetectortop cover and the side cover near the flexible metal hoses connecting both pumps. 4 Detach both flexible metal hoses from the vacuum manifold. 5 Unplug the fore pump from inside the basic module. 6 Remove three screws to separate the basic module from the pump modules. See Figure 5-1. ) 7 Carefully separate the basic module from the fore pump module. 8 Remove the flexible metal hose from the fore pump by removing the K-F clamp. WARNING Hotoil will burn the skin. Service in this areamustbe performed by authorized personnelonly. Stand back from fore pump before starting it. CAUTION Do not leave the fore pump on after the oil has stopped flowing. Damage to the fore pump can occur if it is allowed to operate with no oil. 9 Place a suitable drain pan under the fore pump drain guide and remove the drain plug. After the oil is drained, replace the drain plug . 10 With an offset funnel in place in the pump inlet (not the front fill hole), plug the fore pump into a separate supply, turn it on, and SLOWL Ypour in approximately 1 cup of <strong>Varian</strong> pump oil, part no. 0491-K7516-302. 11 Turn the fore pump off. With the drain pan in place, remove the drain plug and then turn the fore pump back on. Allow the pump to drain, then turn the fore pump off. 6999-09-720 5-5

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WARRANTY Products manufactured by S
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Tab le of Contents TABLE OF CONTENT
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Table of Contents ) 5-4 Calibration
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List of Illustrations LIST OF ILLUS
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List of Tables LIST OF TABLES Table
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Section I Introduction Figure 1-11
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Section I Introduction (3) TEST PIE
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Section I Introduction connection t
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Section I Introduction (3) CONVERSI
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Section II Description SECTION II D
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Section II Description 3 The rough
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Secti on II Description much lower
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Section II Description Pump Connect
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Section II Description Optical isol
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Section II Description 132h I 03h 1
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Section II Description D Ion Gauge
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Section III Receivi ng and Install
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Section III Receiving and Installat
Page 47 and 48: Section IV Operation SECTION IV OPE
Page 49 and 50: Sec:lon ,'I Operation 4·3 LEVELS O
Page 51 and 52: Section IV Operation appropriate pa
Page 53 and 54: Section IV Operation If the fore pu
Page 55 and 56: Section IV Ope ration V6 Isolation
Page 57 and 58: Section IV Operation V3 Vent ~~ •
Page 59 and 60: Section IV Operation V6 Isolation V
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Page 67 and 68: Section IV Operation The letters "C
Page 69 and 70: Section IV Operation Auto Zeroing a
Page 71 and 72: Section IV Operation Menu 4 - Log/U
Page 73 and 74: Section IV Operation Option 2-2 ena
Page 75 and 76: Section IV Operation Option 1-2 ena
Page 77 and 78: Section IV Operation Menu 15· Date
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Page 81 and 82: Section IV Operation ) Menu 4 Lag/L
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Page 87 and 88: When in the POWER UP mode. the leak
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Page 93: When the V.ENT key is pressed. the
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Page 132 and 133: Section VI Troubleshooting Make sur
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Page 138 and 139: Section VI Troubleshooting 3 Check
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Page 142 and 143: Section VI Troubleshooting ) PIN 1
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Page 146 and 147: Section VI . Troubleshooting ) 6-6
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Section VII Parts List ) 7·8 ILLUS
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Section VIII Glossary of Terms ) CO
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Section VIII Glossary of Terms ) SE
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